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The present invention relates to a method for manufacturing a semiconductor device that includes a porous insulating film, and to a semiconductor device manufactured by the method.
2. Description of the Related Art
Recent ultra-fine patterning in a semiconductor device involves the use of an insulating film having a certain degree of voids for the purpose of further decreasing the film thickness of the insulating film while maintaining excellent electrical insulating properties. This fine patterning makes it necessary to ensure the electrical properties of the insulating film. Particularly, the resistivity of the insulating film is a key parameter when selecting a manufacturing process to form a fine patterning film.
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