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বিবেচনা করেন, তারা কী জানে?. Tamil Movies: Thandavam (2012), HD.. Thandavam Full Movie Download. The movie having Siva, Anushka Shetty and Vishal will release on 14th May 2012. Download.1. Field of the Invention
The present invention relates to a shielded metal grid, which may be suitable for use as a shielding body for a charged particle beam apparatus such as an accelerator, and to a method of producing a shielded metal grid.
2. Description of the Prior Art
As is well known, charged particle beams, such as electron beams and ion beams, may be used to manufacture various devices and equipment. For example, a charged particle beam device may be used to expose a pattern on a resist in the manufacture of a semiconductor device or patterned circuit elements (e.g. LCDs), and an ion beam device may be used to implant atoms into a substrate, such as a semiconductor substrate, to form a semiconductor device.
A charged particle beam device uses a charged particle beam generator, such as an electron beam or ion beam generator. In a charged particle beam generator, for example, an electron gun generates an electron beam and an acceleration system accelerates the electron beam to a desired energy.
If a charged particle beam is generated or to be generated in the atmosphere, the flow of the beam is obstructed. Therefore, if a charged particle beam is to be generated, it is typically generated in a vacuum environment. In particular, the charged particle beam is typically generated in a chamber of a charged particle beam apparatus. The chamber is sealed so that charged particle beams are not released into the atmosphere of the laboratory. Typically, the charged particle beam apparatus has a shielding body, such as a metal grid, so that the charged particle beams do not leak from the apparatus. The metal grid has openings therethrough so that charged particle beams may pass through the grid. In the charged particle beam apparatus, the metal grid is typically arranged between the charged particle beam generator and a work chamber.
The metal grid is typically formed by shaping metal members of a sheet and joining them together. Japanese Laid-Open Patent Publication No. 2001-266516 describes one way of joining the metal members of the sheet together. In the

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