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I write to share with my favorite people my own experiences and my thoughts on life and the Universe. This blog helps to manage my possessions and household effectively.
Contact me via my e-mail address, if you need anything.1. Field of the Invention
The present invention relates to a substrate processing apparatus and a substrate processing method.
2. Description of the Related Art
A technique has been developed in which a substrate is processed using a processing liquid that contains a treatment liquid, which is a processing agent to be contained in the processing liquid, to change the property of a film on a surface of the substrate. For example, a liquid state raw material is supplied into a processing liquid tank from a raw liquid tank, and is continuously supplied into a processing tank, and the liquid raw material is allowed to react with a processing agent supplied into the processing tank. By continuously supplying a treatment liquid containing a processing agent and processing the substrate, the chemical and physical properties of the substrate surface can be continuously changed.
A substrate processing apparatus such as a coating treatment apparatus, a developing treatment apparatus, a plating treatment apparatus, etc., comprises a substrate processing container such as a processing tank, a processing liquid supply mechanism such as a raw liquid tank, a processing liquid supply line, a processing liquid supply port, a raw liquid supply port, a treatment liquid supply port, a treatment liquid supply line, a treatment liquid supply port, etc., which are configured for supply and discharge of the processing liquid and the raw liquid, and a processing liquid supply controller for controlling supply of the processing liquid from the processing liquid supply port to the substrate processing container to perform a coating process, a developing process, a plating process, etc. on the substrate.
Japanese Patent Application Laid-Open No. 2007-274378 describes an apparatus for supplying a treatment liquid to a plurality of discharge ports arranged in a treatment liquid supply line. With such an apparatus, the treatment liquid is continuously supplied to the plurality of discharge ports by switching the treatment liquid supply paths that are connected to each discharge port.
However, an apparatus for supplying a treatment liquid in which the treatment liquid supply line has a complicated structure is expensive. In particular, in the case of a processing apparatus in which the treatment liquid supply line is incorporated into the processing apparatus, the treatment liquid supply line is provided inside the processing apparatus and hence there is an increase in size of the treatment liquid supply line.
In addition, the liquid raw material supplied from the raw liquid supply